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АппаратураMicroelectromechanical Systems and Devices

Microelectromechanical Systems and Devices
Название: Microelectromechanical Systems and Devices
Автор: Nazmul Islam
Издательство: InTech
Год: 2012
Страниц: 492
Формат: PDF
Размер: 35 Mb
Язык: Английский

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS.

 



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