Автор: Syed Rizvi
Название: Handbook of Photomask Manufacturing Technology
Издательство:Taylor & Francis
Кол-во страниц: 728
Размер: 25 MB
Photolithography, which was later referred to as microlithography, and now as nanolithography, has unquestionably been one of the major driving forces behind the progress made in the semiconductor technology. Since its early days, the semiconductor industry has strived to make features smaller and smaller so that the maximum number of devices could be packaged into the smallest possible area on a chip. It is in this miniaturization of features that photolithography has made its contribution, and where the advancement in mask making has played its role.
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